Akademik Veri Yönetim Sistemi
The 5th International Conference of Materials and Engineering Technology (TICMET'23), Trabzon, Türkiye, 13 - 16 Kasım 2023
Tantalum and tungsten nitride coatings are significant types of coatings with wide application in various industries. The Physical Vapor Deposition (PVD) process allows for the deposition of metals in their oxide, nitride, and metallic forms onto any surface easily. Adding silver to this process aims to create antibacterial coatings. However, even a small amount of silver addition significantly enhances Raman analysis signal values due to its plasmonic effect; 1) Background: Silver-doped and undoped Ta-W-N coatings were produced using the PVD method; 2) Methods: The coatings were completed at 5x10-3 mTorr pressure with 99.95% purity, using Argon and Nitrogen gases. SEM and Raman analyses were performed on the coatings; 3) Results: The addition of silver led to the formation of large nodules, resulting in a slightly rougher surface; 4) Conclusions: In this study, Ta-W-N-based coatings with or without silver were successfully grown using the PVD process. Silver enhances Raman signals due to the observation of surface plasmon resonance. In summary, Tantalum and tungsten nitride coatings offer valuable applications across diverse industries, and the PVD process allows for their efficient deposition. The addition of silver brings forth unique benefits, particularly in enhancing Raman signals through plasmonic effects.