E. Odabaş Et Al. , "FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD," World Conference on Technology, Innovation and Entrepreneurship , 2015
Odabaş, E. Et Al. 2015. FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD. World Conference on Technology, Innovation and Entrepreneurship .
Odabaş, E., Aras, G., ORHAN, E., & BOYDAŞ, E., (2015). FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD . World Conference on Technology, Innovation and Entrepreneurship
Odabaş, Emre Et Al. "FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD," World Conference on Technology, Innovation and Entrepreneurship, 2015
Odabaş, Emre Et Al. "FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD." World Conference on Technology, Innovation and Entrepreneurship , 2015
Odabaş, E. Et Al. (2015) . "FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD." World Conference on Technology, Innovation and Entrepreneurship .
@conferencepaper{conferencepaper, author={Emre Odabaş Et Al. }, title={FABRICATION AND CHARACTERIZATION OF SILICON NITRIDE Si3N4 THIN FILMS BY PLASMA ENHANCEMENT CHEMICAL VAPOR DEPOSITION PECVD}, congress name={World Conference on Technology, Innovation and Entrepreneurship}, city={}, country={}, year={2015}}