Platinum activated WO3 optical hydrogen sensors

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Atıf İçin Kopyala

Çoban Ö., Gür E., Tüzemen S.

Materials Today: Proceeding, cilt.46, ss.6913-6915, 2021 (Hakemli Dergi)

• Yayın Türü: Makale / Tam Makale
• Cilt numarası: 46
• Basım Tarihi: 2021
• Doi Numarası: 10.1016/j.matpr.2021.01.556
• Dergi Adı: Materials Today: Proceeding
• Derginin Tarandığı İndeksler: INSPEC
• Sayfa Sayıları: ss.6913-6915
• Atatürk Üniversitesi Adresli: Evet

Özet

In this study, WO3 metal oxide structure was investigated as an optical gas sensor. 90 nm WO3 thin films

were grown by RF magnetron sputtering on glass substrates. In order to obtain a sensitive layer for H2

gas, 10 nm Pt was coated on the top of WO3 film gas by the same technique. Optical absorbance variations

of Pt activated WO3 thin film gas sensor structure (Pt/ WO3) were measured at 40
C, 75
C and 125
C for

different Hydrogen concentration level of 1000 ppm
40.000 ppm. A tungsten halogen lamb and a CCD

spectrometer was used at optical gas sensor test system to measure optical absorbance of sensor realtime.