Platinum activated WO3 optical hydrogen sensors

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Çoban Ö. , Gür E. , Tüzemen S.

Materials Today: Proceeding, vol.46, pp.6913-6915, 2021 (Journal Indexed in ESCI)

  • Publication Type: Article / Article
  • Volume: 46
  • Publication Date: 2021
  • Doi Number: 10.1016/j.matpr.2021.01.556
  • Title of Journal : Materials Today: Proceeding
  • Page Numbers: pp.6913-6915


In this study, WO3 metal oxide structure was investigated as an optical gas sensor. 90 nm WO3 thin films

were grown by RF magnetron sputtering on glass substrates. In order to obtain a sensitive layer for H2

gas, 10 nm Pt was coated on the top of WO3 film gas by the same technique. Optical absorbance variations

of Pt activated WO3 thin film gas sensor structure (Pt/ WO3) were measured at 40 C, 75 C and 125 C for

different Hydrogen concentration level of 1000 ppm  40.000 ppm. A tungsten halogen lamb and a CCD

spectrometer was used at optical gas sensor test system to measure optical absorbance of sensor realtime.