Synthesis of Ta/TaN Coatings with CFUBMS-HiPIMS Technology and Investigation of Mechanical-Tribological Properties

Polat M. A., Gülten G., Maleque M. A., Masjuki H., Çetin S., Efeoğlu İ.

5th International Conference on Advances in Manufacturing and Materials Engineering, Kuala-Lumpur, Malaysia, 9 - 10 August 2022, pp.1-6

  • Publication Type: Conference Paper / Full Text
  • City: Kuala-Lumpur
  • Country: Malaysia
  • Page Numbers: pp.1-6
  • Ataturk University Affiliated: Yes

Abstract

The aim of this work is to study the mechanical and tribological behavior of Ta/TaN coated 52100 tool steel. Ta/TaN thin film have been deposited by CFUBMS-HiPIMS method. In the early 2000s, it started to show itself in R&D studies with the technological developments in electronic power designs for HiPIMS technology. Today, HiPIMS has been integrated and successfully used as a hybrid in magnetic field sputtering systems for R&D purposes and industrial scale. HiPIMS technology provides a stable and uniform discharge plasma formation with high current density, ensuring that the growth of the high-density coating and the adhesion bond at the interface is strong.  The development of graded Ta/TaN coating structures to optimize adhesion and wear behavior are crucial in high adhesion and lower wear levels when depositing very hard brittle coatings. Ta/TaN films have excellent friction and wear properties. For this reason, it is predicted that it will be effective in increasing efficiency and performance for many industrial applications, especially in biodiesel injectors.