Characterization of titanium and niobium doped dlc films grown by pulsed DC PVD - Closed field unbalanced magnetron sputtering (CFUBMS) method

Ugur D., Efeoglu I., Altintas S.

ASME/STLE International Joint Tribology Conference, California, Amerika Birleşik Devletleri, 22 - 24 Ekim 2007, ss.917-919 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1115/ijtc2007-44257
  • Basıldığı Şehir: California
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.917-919
  • Atatürk Üniversitesi Adresli: Evet

Özet

In this research, structural, tribological and mechanical characterization of Nb and Ti doped diamond like carbon (DLC) films was carried out. Films were grown on M2 high speed steel (HSS), glass and silicon wafer substrates by pulsed DC physical vapor deposition - closed field unbalanced magnetron sputtering (PVD-CFUBMS) method. Structural characterization of the coatings was done by using Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and X-Ray Photoelectron Spectroscopy (XPS) tests.