Deep Learning for Robust Defect Detection in SEM Wafer Images under Imbalanced Data Distribution


Kılıç R., Sağlam H. K.

2nd International Congress on Science and Technology (ICSAT 2026), Erzurum, Turkey, 7 - 09 May 2026, pp.133-137, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • City: Erzurum
  • Country: Turkey
  • Page Numbers: pp.133-137
  • Ataturk University Affiliated: Yes