SnO2 Ultra-Thin Film Gas Sensor Fabricated by Ultrasonic Spray Pyrolysis (USP) Method


SAĞLAM H. K., MASAT M., ERTUĞRUL M.

4th International Symposium on Advanced Materials and Nanotechnology, iSAMN 2020, Serdang, Malezya, 1 - 03 Aralık 2020, cilt.2506 identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası: 2506
  • Doi Numarası: 10.1063/5.0084305
  • Basıldığı Şehir: Serdang
  • Basıldığı Ülke: Malezya
  • Atatürk Üniversitesi Adresli: Evet

Özet

© 2022 American Institute of Physics Inc.. All rights reserved.In this study, SnO2: Sn films were produced by ultrasonic spray pyrolysis technique. Extremely transparent and conductive SnO2 thin films were deposited with SnCl2 as the precursor solution and optimum preparation conditions were achieved. Transparent Conductive Oxide (TCO) materials have some advantages compared to other types of semiconductors such as simple and small structure, low cost and ease of sensor applications in the working environment. Structural etc. properties of tin oxide thin films synthesized at 400°C were investigated. XRD results showed that ultra-thin SnO2 films were produced via ultrasonic spray pyrolysis. Sensor test results show that these films react to H2 gas and that film thickness has an effect on sensor performance.