The effect of nitrogen flow rate on TiBN coatings deposited on cold work tool steel

Cicek H., BARAN Ö., DEMIRCI E. E., TAHMASEBIAN M., TOTİK Y., EFEOĞLU İ.

JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, cilt.28, sa.12, ss.1140-1148, 2014 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 28 Sayı: 12
  • Basım Tarihi: 2014
  • Doi Numarası: 10.1080/01694243.2014.888890
  • Dergi Adı: JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.1140-1148
  • Anahtar Kelimeler: CFUBMS, critical load, adhesion, nitrogen, TiBN coatings, B-N COATINGS, MECHANICAL-PROPERTIES, HARD COATINGS, FILMS, ADHESION, SCRATCH, SUBSTRATE, BIAS
  • Atatürk Üniversitesi Adresli: Evet

Özet

TiBN coatings have high hardness and high adhesion. Due to these excellent properties there has been increasing interest in TiBN coatings. In this study, TiBN coatings were deposited on AISI D2 cold work tool steel and silicon wafers by closed field unbalanced magnetron sputtering (CFUBMS). The structural, mechanical and adhesion properties of these coatings were analysed by X-ray diffraction, scanning electron microscopy, microhardness test, indentation test and scratch tests. TiBN coatings produced by magnetron sputtering exhibited a dense and columnar structure. These results indicate that TiB2, TiN and h-BN exist in crystalline forms at all coatings. The highest hardness was obtained at the lowest nitrogen flow rate. Very few cracks were observed at the edge of the indentation marks at the highest nitrogen flow rate. The highest critical load obtained with scratch test was identified as 102 N.