ION-ASSISTED CVD OF GRADED DIAMOND-LIKE CARBON (DLC) BASED COATINGS

MONAGHAN D., TEER D., ARNELL R., EFEOGLU I., AHMED W.

JOURNAL DE PHYSIQUE IV, cilt.3, ss.579-587, 1993 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 3
  • Basım Tarihi: 1993
  • Doi Numarası: 10.1051/jp4:1993380
  • Dergi Adı: JOURNAL DE PHYSIQUE IV
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.579-587
  • Atatürk Üniversitesi Adresli: Evet

Özet

Graded DLC based coatings and multilayers for wear resistance applications have been produced using a novel hybrid unbalanced magnetron sputtering/ low pressure CVD system. The main features of this highly flexible and scalable process are discussed. These films have been characterised using a variety of techniques including SEM, microhardness, adhesion, wear rate and lifetime tests. For example: microhardness of > 4000 Hv; excellent adhesion, Lc 115-125 N; coefficient of friction during prolonged running against WC of 0.15; volumetric wear rates 1/5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.