ION-ASSISTED CVD OF GRADED DIAMOND-LIKE CARBON (DLC) BASED COATINGS
JOURNAL DE PHYSIQUE IV, cilt.3, ss.579-587, 1993 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 3
- Basım Tarihi: 1993
- Doi Numarası: 10.1051/jp4:1993380
- Dergi Adı: JOURNAL DE PHYSIQUE IV
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
- Sayfa Sayıları: ss.579-587
- Atatürk Üniversitesi Adresli: Evet
Özet
Graded DLC based coatings and multilayers for wear resistance applications have been produced using a novel hybrid unbalanced magnetron sputtering/ low pressure CVD system. The main features of this highly flexible and scalable process are discussed. These films have been characterised using a variety of techniques including SEM, microhardness, adhesion, wear rate and lifetime tests. For example: microhardness of > 4000 Hv; excellent adhesion, Lc 115-125 N; coefficient of friction during prolonged running against WC of 0.15; volumetric wear rates 1/5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.