Comparison of structure and tribological properties of MoS2-Ti films deposited by biased-dc and pulsed-dc

ARSLAN E., TOTİK Y., EFEOĞLU İ.

PROGRESS IN ORGANIC COATINGS, cilt.74, sa.4, ss.772-776, 2012 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Derleme
  • Cilt numarası: 74 Sayı: 4
  • Basım Tarihi: 2012
  • Doi Numarası: 10.1016/j.porgcoat.2011.10.021
  • Dergi Adı: PROGRESS IN ORGANIC COATINGS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.772-776
  • Anahtar Kelimeler: Magnetron sputtering, Pulsed-dc, Biased-dc, MoS2, Friction, Wear, WEAR PROPERTIES, COATINGS, LUBRICATION, FRICTION, VOLTAGE
  • Atatürk Üniversitesi Adresli: Evet

Özet

A closed field unbalanced magnetron sputter (Teer-CFUBMS/550) system was used for the deposition of MoS2-Ti composite coatings on steel substrate (AISI D2) using biased-dc and pulsed-dc. The tribological properties of MoS2-Ti coatings were characterized by pin-on-disc wear tester under atmospheric conditions. Structural analysis was pointed out using X-ray diffraction and SEM-EDS. The microstructure and chemical composition of MoS2-Ti films are very strongly influenced by the sputtering process conditions. While X-ray diffraction pattern of films deposited using pulsed-dc shows mainly (0 0 2) reflections, the films deposited by dc-bias exhibit random orientation being both (0 0 2) and (1 0 0) reflections. Tribological performance of the films deposited using both techniques were compared in view of both crystallographic orientation and Ti content. (C) 2011 Elsevier B.V. All rights reserved.