Microstructural Evolution of MOVPE Grown GaN by the Carrier Gas

DEMİR İ., ALTUNTAŞ İ., KASAPOĞLU A. E., MOBTAKERİ S., Guer E., Elagoz S.

SEMICONDUCTORS, cilt.52, sa.16, ss.2030-2038, 2018 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 52 Sayı: 16
  • Basım Tarihi: 2018
  • Doi Numarası: 10.1134/s1063782618160066
  • Dergi Adı: SEMICONDUCTORS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.2030-2038
  • Anahtar Kelimeler: metalorganic vapor phase epitaxy, gallium nitride, epitaxy, dislocation, 2-STEP GROWTH, MORPHOLOGY, QUALITY, DISLOCATIONS, TEMPERATURE, LAYERS
  • Atatürk Üniversitesi Adresli: Evet

Özet

We report the effect of total carrier gas flow of GaN during both GaN nucleation layer and high temperature GaN growth steps on structural, optical, electrical and morphological properties. The formation of dislocations in GaN layer and their effects were investigated in detail as a function of carrier gas flow. It has been found that the more carrier gas requires longer recovery time for transition from 3D (3 dimensional) to 2D growth and results in smaller edge-type dislocation density. The images obtained from the AFM measurements have shown terraces widths varying between 60-150 nm depending on the hydrogen flow rate.