The barrier height inhomogeneity in identically prepared Pb/p-type Si Schottky barrier diodes

NUHOGLU C., Aydogan S., TURUT A.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, cilt.18, sa.7, ss.642-646, 2003 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 18 Sayı: 7
  • Basım Tarihi: 2003
  • Doi Numarası: 10.1088/0268-1242/18/7/307
  • Dergi Adı: SEMICONDUCTOR SCIENCE AND TECHNOLOGY
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.642-646
  • Atatürk Üniversitesi Adresli: Evet

Özet

We have studied the experimental linear relationship between barrier heights (BHs) and ideality factors for Pb/p-type Si(100) Schottky contacts with a doping density of about 10(15) cm(-3). The BH for the Pb/p-type Si(100) diodes from the current-voltage (I-V) characteristics varied from 0.686 to 0.735 eV, the ideality factor n varied from 1.054 to 1.191, and from capacitance-voltage (C-2-V) characteristics the BH varied from 0.751 to 0.928 eV. The experimental BH distributions obtained from the I-V and C-2-V characteristics were fitted by a Gaussian function, and their mean BH values were found to be 0.709 and 0.799 eV, respectively. The laterally homogeneous BH value of approximately 0.741 eV for the H-terminated Pb/p-type Si(100) Schottky diodes was obtained from the linear relationship between experimental effective BHs and ideality factors.