Fabrication of highly reflective gratings in 1.5 μm semiconductor lasers using focused ion beam-based etching

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CAKMAK B., KARACALI T., REN Z., YU S.

Microelectronic Engineering, vol.87, no.11, pp.2343-2347, 2010 (SCI-Expanded)

• Publication Type: Article / Article
• Volume: 87 Issue: 11
• Publication Date: 2010
• Doi Number: 10.1016/j.mee.2010.04.004
• Journal Name: Microelectronic Engineering
• Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
• Page Numbers: pp.2343-2347
• Ataturk University Affiliated: Yes