Fabrication of highly reflective gratings in 1.5 μm semiconductor lasers using focused ion beam-based etching


CAKMAK B., KARACALI T., REN Z., YU S.

Microelectronic Engineering, vol.87, no.11, pp.2343-2347, 2010 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 87 Issue: 11
  • Publication Date: 2010
  • Doi Number: 10.1016/j.mee.2010.04.004
  • Journal Name: Microelectronic Engineering
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.2343-2347
  • Ataturk University Affiliated: Yes